There is a minor bug in Waveforms 3.8.2 in the Impedance Analyzer:  the metadata for probe resistance and capacitance seem to be swapped:

#ProbeCapacitance: 1.04e+06 Ω
#ProbeResistance: 4.3e-11 F  

Also, the metadata does not include the excitation (amplitude and offset).

I would check the beta release of newer versions, but there doesn't seem to be a beta for the Mac OS X, just Windows and Linux.

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